SOLID IMMERSION LENS, AND SAMPLE OBSERVING METHOD USING IT

Title:

SOLID IMMERSION LENS, AND SAMPLE OBSERVING METHOD USING IT

Document Type and Number:

WIPO Patent Application WO/2004/088386

Kind Code:

A1

Abstract:

The image of a sample (2) is observed by using a solid immersion lens (SIL) (1) formed of a material having a refractive index n_L so as to have a spherical lens plane (10) having a radius of curvature R_L. During the sample observation, geometric aberration characteristics by the SIL (1) are evaluated using a specified optical system. With a coefficient k (0L/n_L) downstream the spherical center (C) of the lens plane (10) along the optical axis (Ax) and being orthogonal to the optical axis (Ax) is used as a sample observing plane (20) to observe a sample using the SIL (1). Accordingly, a sample observing method able to observe the good image of a sample using a solid immersion lens, and a solid immersion lens are realized.

Inventors:

ARATA IKUO (JP)
TERADA HIROTOSHI (JP)

Application Number:

PCT/JP2004/003734

Publication Date:

October 14, 2004

Filing Date:

March 19, 2004

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)
ARATA IKUO (JP)
TERADA HIROTOSHI (JP)

International Classes:

G01N21/17; G02B3/00; G02B9/00; G02B13/00; G02B21/00; G02B21/02; G02B21/33; (IPC1-7): G02B13/00; G02B21/02; G01N21/17

Foreign References:

JPH0718806B2	1995-03-06
JPH08315404A	1996-11-29
JP2000011423A	2000-01-14
JPH11203711A	1999-07-30
JPH11202194A	1999-07-30

Other References: