Title:
SOURCE MATCHER
Document Type and Number:
WIPO Patent Application WO/2019/139395
Kind Code:
A1
Abstract:
A source matcher of the present invention may comprise: an RF oscillator unit for applying power for plasma generation to a plurality of coils installed in a chamber; an RF matcher unit for matching a load impedance to the characteristic impedance of at least one of the chamber, the RF oscillator unit, and the coils; a splitter unit for distributing, among the respective coils, the power output from the RF matcher unit; and a control unit for controlling the matching efficiency of the RF matcher unit or the splitter unit.
Inventors:
JUNG CHANG SEOK (KR)
LIM DO SHIG (KR)
PARK JUNG IK (KR)
HWANG MIN JU (KR)
LIM DO SHIG (KR)
PARK JUNG IK (KR)
HWANG MIN JU (KR)
Application Number:
PCT/KR2019/000440
Publication Date:
July 18, 2019
Filing Date:
January 11, 2019
Export Citation:
Assignee:
EQ GLOBAL INC (KR)
International Classes:
H01J37/32; H03H7/38
Foreign References:
| KR100934402B1 | 2009-12-31 | |||
| KR20080106296A | 2008-12-04 | |||
| KR20080086556A | 2008-09-25 | |||
| KR20120137301A | 2012-12-20 | |||
| KR20140137964A | 2014-12-03 |
Attorney, Agent or Firm:
TW INTERNATIONAL PATENT AND LAWFIRM (KR)
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