Title:
SPRAY NOZZLE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/191393
Kind Code:
A1
Abstract:
The present invention relates to a spray nozzle apparatus. A spray nozzle apparatus of the present invention comprises: a first nozzle portion having therein a first inner flow path, which is connected to a first spray port for spraying a fluid, and a first injection port for injecting the fluid to the first inner flow path; a second nozzle portion located inside the first inner flow path and having a second spray port, for spraying plasma, on one side adjacent to the first spray port; and a distribution portion located between the first nozzle portion and the second nozzle portion and partitioning the first inner flow path into a first partition flow path connected to the first spray port and a second partition flow path connected to the first injection port, wherein the distribution portion may comprise a plurality of connection flow paths connecting the first partition flow path and the second partition flow path.
Inventors:
PARK JAE BEOM (KR)
CHOI IN HO (KR)
CHOI IN HO (KR)
Application Number:
PCT/KR2021/020351
Publication Date:
September 15, 2022
Filing Date:
December 31, 2021
Export Citation:
Assignee:
APPLIED PLASMA INC (KR)
International Classes:
C23C16/513; B05B7/22; C23C4/134
Foreign References:
| KR20170014983A | 2017-02-08 | |||
| KR20140108165A | 2014-09-05 | |||
| KR20180014108A | 2018-02-07 | |||
| JP2012015180A | 2012-01-19 | |||
| KR100930579B1 | 2009-12-09 |
Other References:
See also references of EP 4079411A4
Attorney, Agent or Firm:
SHIN, Moo Yun (KR)
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