Title:
SPUTTER DEPOSITION PROCESS FOR ELECTROLUMINESCENT PHOSPHORS
Document Type and Number:
WIPO Patent Application WO2003056056
Kind Code:
A3
Abstract:
The invention is a novel sputter deposition process for thin film phosphors that provide high luminance and colors required for TV applications. The method is a dual source sputtering method for the deposition of a thin film phosphor composition onto a substrate and comprises providing a metal as a first source; providing a sulfur bearing compound as a second source; doping the first or second source with a rare earth activator; and applying sufficient current to the first and second sources in a sulfur containing atmosphere to effect sputtering of the first and second targets and deposition of the phosphor composition onto the substrate.
Inventors:
KOSYACHKOV ALEXANDER (CA)
Application Number:
PCT/CA2002/001894
Publication Date:
September 04, 2003
Filing Date:
December 10, 2002
Export Citation:
Assignee:
IFIRE TECHNOLOGY INC (CA)
KOSYACHKOV ALEXANDER (CA)
KOSYACHKOV ALEXANDER (CA)
International Classes:
C09K11/00; C09K11/02; C09K11/64; C09K11/77; C09K11/80; C09K11/84; H05B33/10; C23C14/00; C23C14/06; C23C14/34; H05B33/14; (IPC1-7): C23C14/06; C23C14/00; H05B33/10; H05B33/14; C09K11/80; C09K11/84
Domestic Patent References:
| WO2002051960A1 | 2002-07-04 | |||
| WO2002023957A1 | 2002-03-21 |
Foreign References:
| EP0740490A1 | 1996-10-30 | |||
| US5500103A | 1996-03-19 | |||
| EP0667383A2 | 1995-08-16 |
Other References:
BENALLOUL P ET AL: "IIA-II2-S4 TERNARY COMPOUNDS: NEW HOST MATRICES FOR FULL COLOR THINFILM ELECTROLUMINESCENCE DISPLAYS", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 63, no. 14, 4 October 1993 (1993-10-04), pages 1954 - 1956, XP000397851, ISSN: 0003-6951
MIURA N ET AL: "High-luminance blue-emitting BaAl/sub 2/S/sub 4/:Eu thin-film electroluminescent devices", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 2 (LETTERS), 15 NOV. 1999, PUBLICATION OFFICE, JAPANESE JOURNAL APPL. PHYS, JAPAN, vol. 38, no. 11B, pages L1291 - L1292, XP002234973, ISSN: 0021-4922
MIURA N ET AL: "High-luminance blue-emitting BaAl/sub 2/S/sub 4/:Eu thin-film electroluminescent devices", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 2 (LETTERS), 15 NOV. 1999, PUBLICATION OFFICE, JAPANESE JOURNAL APPL. PHYS, JAPAN, vol. 38, no. 11B, pages L1291 - L1292, XP002234973, ISSN: 0021-4922
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