Title:
SPUTTERING TARGET FOR MAGNETIC RECORDING FILM
Document Type and Number:
WIPO Patent Application WO/2013/190943
Kind Code:
A1
Abstract:
A carbon-containing sputtering target for a magnetic recording film, characterized in that the peak intensity ratio (IG/ID) of G band to D band in Raman spectroscopy is 5.0 or more. The present invention addresses the problem of providing a sputtering target, particularly an Fe-Pt sputtering target, which is for a magnetic recording film and which contains carbon particles dispersed therein and which enables the formation of a magnetic granular film without using an expensive cosputtering device. Since carbon is a material which is not susceptible to being sintered and is susceptible to aggregation, a conventional carbon-containing sputtering target has the disadvantage that the desorption of carbon lumps occurs during sputtering to result in a sputtered film which has many particles on the surface. The present invention also addresses the problem of providing a high-density sputtering target that can overcome the disadvantage.
Inventors:
OGINO SHIN-ICHI (JP)
Application Number:
PCT/JP2013/064242
Publication Date:
December 27, 2013
Filing Date:
May 22, 2013
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP (JP)
International Classes:
G11B5/851; C22C1/05; C22C5/04; C22C32/00; C22C38/00; C23C14/34; G11B5/64
Domestic Patent References:
| WO2012073879A1 | 2012-06-07 | |||
| WO2012073882A1 | 2012-06-07 | |||
| WO2012132939A1 | 2012-10-04 | |||
| WO2012133166A1 | 2012-10-04 |
Foreign References:
| JP2012102387A | 2012-05-31 | |||
| JP2006127621A | 2006-05-18 | |||
| JP2005533182A | 2005-11-04 | |||
| JP2013037730A | 2013-02-21 |
Attorney, Agent or Firm:
OGOSHI Isamu et al. (JP)
Isamu Ogoshi (JP)
Isamu Ogoshi (JP)
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