Title:
STAGE ASSEMBLY HAVING VENT STRUCTURE FOR PREVENTING CONDENSATION
Document Type and Number:
WIPO Patent Application WO/2023/158006
Kind Code:
A1
Abstract:
The present invention relates to a stage assembly having a vent structure for preventing condensation and, more particularly, to a stage assembly having a vent structure for preventing condensation in which a flow channel is formed in a stage to allow air around a vessel above the stage to pass inside equipment such that the temperature of the surface of the vessel facing the stage is similar to the temperature around the vessel, thereby preventing condensation from forming; the structure thereof is simplified and the number of parts is reduced so as to mount all driving parts in a space smaller than the diameter of a knob that drives the stage; and a scotch yoke mechanism is applied thereto so as to enable a rotary shaft itself connected to the knob to become a driving device so that the rotary shaft connected to the knob can create a linear motion, thereby reducing costs, preventing pinching accidents due to exposure of the driving device, and improving a contamination prevention function by preventing foreign objects from entering.
Inventors:
PARK YOUNG HO (KR)
AN SUNG EUN (KR)
KIM BONG WOO (KR)
AN SUNG EUN (KR)
KIM BONG WOO (KR)
Application Number:
PCT/KR2022/002816
Publication Date:
August 24, 2023
Filing Date:
February 25, 2022
Export Citation:
Assignee:
CURIOSIS CO LTD (KR)
International Classes:
H01J37/20
Foreign References:
| JP2007247704A | 2007-09-27 | |||
| EP2037137B1 | 2013-07-10 | |||
| JP3869938B2 | 2007-01-17 | |||
| JP2006174828A | 2006-07-06 |
Other References:
CURIOSIS INC. Celloger Nano. 유튜브 (Youtube). [online]. 09 September 2021. [Retrieved on 24 October 2022]. Retrieved from the Internet: .
Attorney, Agent or Firm:
GURU IP LAW FIRM (KR)
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