Title:
STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/225110
Kind Code:
A1
Abstract:
The problem addressed by the present disclosure is to provide a stage device, a charged particle beam device, and a vacuum device, with which it is possible to increase the speed and the acceleration of positioning and to suppress the leakage of a magnetic field. As a means to resolve this problem, a stage device 100 comprises a support stage 10, a floating mechanism 20, and a movement stage 30. The movement stage 30 has a propulsion-applying unit 36, and the support stage 10 has a propulsion-receiving unit 11. The stage device 100 is configured so that when the movement stage 30 moves and the propulsion-applying unit 36 contacts or approaches the propulsion-receiving unit 11, the propulsion-applying unit 36 applies propulsion in the movement direction to the propulsion-receiving unit 11.
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Inventors:
TAKAHASHI MOTOHIRO (JP)
KATO TAKANORI (JP)
WATANABE NARUO (JP)
OGAWA HIRONORI (JP)
KATO TAKANORI (JP)
WATANABE NARUO (JP)
OGAWA HIRONORI (JP)
Application Number:
PCT/JP2019/008226
Publication Date:
November 28, 2019
Filing Date:
March 01, 2019
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01J37/20; G03F7/20; H01L21/68
Foreign References:
| JP2000106344A | 2000-04-11 | |||
| JP2005209670A | 2005-08-04 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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