Title:
STAGE DEVICE FOR OPTICAL INSTRUMENT
Document Type and Number:
WIPO Patent Application WO/2023/100395
Kind Code:
A1
Abstract:
In order to realize a stage device for an optical instrument that can accurately direct an optical instrument to a desired target position on an object supported on a moving stage, to support the object and direct an optical instrument 1 at any location on the object, a stage device for an optical instrument 2 was configured comprising a table 22 that can move together with the object, and a detection mechanism that detects the deviation between a target position to which the optical instrument 1 should be directed on the object supported by the table 22 and the position to which the optical instrument 1 is actually directed.
Inventors:
SUZUKI MASAMI (JP)
IMURA SHOICHI (JP)
NAKASHIBA SHINICHI (JP)
IMURA SHOICHI (JP)
NAKASHIBA SHINICHI (JP)
Application Number:
PCT/JP2022/023272
Publication Date:
June 08, 2023
Filing Date:
June 09, 2022
Export Citation:
Assignee:
KATAOKA CORP (JP)
International Classes:
G05D3/12; B23K26/04; G02B21/26
Foreign References:
| JP2010099674A | 2010-05-06 | |||
| JP2004330205A | 2004-11-25 | |||
| JP2011177731A | 2011-09-15 |
Attorney, Agent or Firm:
AKAZAWA, Kazuhiro et al. (JP)
Download PDF:
Previous Patent: PROGRESS MANAGEMENT DEVICE, SYSTEM, AND METHOD
Next Patent: OPTICAL MODULE AND OPTICAL DEVICE
Next Patent: OPTICAL MODULE AND OPTICAL DEVICE