Title:
STEP-AND-REPEAT-TYPE IMPRINTING DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2016/010105
Kind Code:
A1
Abstract:
The invention provides a step-and-repeat-type imprinting device with which it is possible to suppress occurrences of failure during imprinting, and to suppress mold damage.
The invention provides a step-and-repeat-type imprinting device comprising: a stage on which a stage base material is placed; a positioning mechanism which is configured in such a way as to be capable of moving relative to the stage, and which holds a flexible base material in such a way that said flexible base material opposes the stage base material; and a pressing mechanism which presses the flexible base material toward the stage base material while causing the flexible base material to bend. One of either the stage base material or the flexible base material has an indented pattern, and the other of the stage base material and the flexible base material is provided with a transfer-target resin layer to which the indented pattern is transferred. The step-and-repeat-type imprinting device is configured in such a way that, by the pressing mechanism pressing the flexible base material toward the stage base material while causing the flexible base material to bend, the indented pattern is transferred to the transfer-target resin layer.
Inventors:
MIYAZAWA YUKIHIRO (JP)
Application Number:
PCT/JP2015/070365
Publication Date:
January 21, 2016
Filing Date:
July 16, 2015
Export Citation:
Assignee:
SOKEN KAGAKU KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2007019451A | 2007-01-25 | |||
| JP2005108975A | 2005-04-21 | |||
| JP2004165220A | 2004-06-10 | |||
| JP2012227298A | 2012-11-15 | |||
| JP2011143679A | 2011-07-28 |
Other References:
See also references of EP 3171391A4
Attorney, Agent or Firm:
SK INTELLECTUAL PROPERTY LAW FIRM et al. (JP)
SK patent business corporation (JP)
SK patent business corporation (JP)
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