STEREOSCOPIC THREE-DIMENSIONAL METROLOGY SYSTEM AND METHOD

Title:

STEREOSCOPIC THREE-DIMENSIONAL METROLOGY SYSTEM AND METHOD

Document Type and Number:

WIPO Patent Application WO2003058158

Kind Code:

A3

Abstract:

A stereoscopic three-dimensional optical metrology system (100) and method accurately measure the location of physical features (129) on a test article (120) in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article (120) from two or more perspectives through a substantially transparent fiducial plate (190) bearing a fiducial marking (199); camera (111,112) viewing angles and apparent relative distances between a feature on a test article (120) and one or more fiducials (199) may enable accurate calculation of feature position.

Inventors:

SNOW DONALD B (US)
STROM JOHN T (US)
KRAFT RAYMOND H (US)

Application Number:

PCT/US2002/040610

Publication Date:

September 18, 2003

Filing Date:

December 18, 2002

Export Citation:

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Assignee:

APPLIED PRECISION LLC (US)
SNOW DONALD B (US)
STROM JOHN T (US)
KRAFT RAYMOND H (US)

International Classes:

G01B11/03; G01B11/245; G01B11/25; G01B11/00; G01C11/06; H01L21/66; H05K13/00; (IPC1-7): G01B11/14; G01B11/24; A61B5/00

Foreign References:

US6122541A	2000-09-19
US5389101A	1995-02-14
US5603318A	1997-02-18

Other References: