Title:
STIFFNESS FREQUENCY ADJUSTABLE TWO-DIMENSIONAL MICRO MOTION PLATFORM BASED ON THE STRESS STIFFENING PRINCIPLE
Document Type and Number:
WIPO Patent Application WO/2015/176444
Kind Code:
A1
Abstract:
A stiffness frequency adjustable two-dimensional micro motion platform based on the stress stiffening principle comprises an X-movement and a Y-movement sub-platforms (203,204) and relevant actuators, a micro motion working platform (5), and film groups (201,202) to adjust the tension by means of screws (7,11) are used as a flexible hinge, thus an independent adjustment for vibration frequency of the two-dimensional micro motion platform can be achieved. Based on the adjustable pre-stress films, the micro motion platform can adjust the natural frequency of the micro motion platform according to different working conditions and driving frequency, and provides two orthogonal feeding movement directions so as to avoid the generation of jiggling process of the micro motion working platform in a two-dimensional motion. And the platform is used for the precision displacement compensation of a general X/Y-movement platform.
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Inventors:
YANG ZHIJUN (CN)
BAI YOUDUN (CN)
CHEN XIN (CN)
GAO JIAN (CN)
YANG HAIDONG (CN)
WANG MENG (CN)
TANG HUI (CN)
BAI YOUDUN (CN)
CHEN XIN (CN)
GAO JIAN (CN)
YANG HAIDONG (CN)
WANG MENG (CN)
TANG HUI (CN)
Application Number:
PCT/CN2014/087285
Publication Date:
November 26, 2015
Filing Date:
September 24, 2014
Export Citation:
Assignee:
UNIV GUANGDONG TECHNOLOGY (CN)
International Classes:
B23Q5/34; B23Q1/34
Foreign References:
| CN203804647U | 2014-09-03 | |||
| CN202861789U | 2013-04-10 | |||
| CN103170845A | 2013-06-26 | |||
| CN101837586A | 2010-09-22 | |||
| CN102490021A | 2012-06-13 | |||
| US20140035959A1 | 2014-02-06 |
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
北京品源专利代理有限公司 (CN)
北京品源专利代理有限公司 (CN)
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