Title:
STORAGE TANK, AND MATERIAL VAPORIZATION DEVICE AND LIQUID MATERIAL SUPPLY DEVICE PROVIDED WITH STORAGE TANK
Document Type and Number:
WIPO Patent Application WO/2018/110545
Kind Code:
A1
Abstract:
This storage tank comprises a tank (TK), a tank body (200) that houses a liquid material (LM), a cover (210) that covers an opening in the tank body (200), a supporting body (220) that is positioned to face the cover (210), a seal body (230) that is sandwiched between the cover (210) and a flange (201) provided on the opening end of the tank body (200), and a fastening member (240) that fastens the cover (210) and the supporting body (220). The cover can be mounted to the flange while maintaining adhesion even if the thickness of the flange provided on the opening end of the tank body is thin.
Inventors:
TANIGUCHI SHINJI (JP)
Application Number:
PCT/JP2017/044549
Publication Date:
June 21, 2018
Filing Date:
December 12, 2017
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
F17C7/04; B01J7/00
Foreign References:
| JPH0451681A | 1992-02-20 | |||
| JPS5820966A | 1983-02-07 | |||
| JP2011112196A | 2011-06-09 | |||
| JP2010506429A | 2010-02-25 | |||
| JPH08200956A | 1996-08-09 | |||
| US20060144843A1 | 2006-07-06 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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