Title:
STRAIN GAUGE AND PRODUCTION METHOD FOR STRAIN GAUGE
Document Type and Number:
WIPO Patent Application WO/2019/093373
Kind Code:
A1
Abstract:
Provided is a production method whereby a strain gauge having a resistor having a desired resistance value can be produced with a good yield. This production method for strain gauges includes: the formation of a laminate 20 by alternately forming a metal layer 22 and an etching stop layer 24 upon a base material; and patterning the laminate 20 and forming the resistor. The uppermost metal layer 22b (22d) may be removed by etching, in accordance with the resistance value of the resistor.
Inventors:
NIWA SHINICHI (JP)
ASAKAWA TOSHIAKI (JP)
ASAKAWA TOSHIAKI (JP)
Application Number:
PCT/JP2018/041336
Publication Date:
May 16, 2019
Filing Date:
November 07, 2018
Export Citation:
Assignee:
MINEBEA MITSUMI INC (JP)
International Classes:
G01B7/16; B32B38/10
Foreign References:
| JP2006234384A | 2006-09-07 | |||
| JPH0936061A | 1997-02-07 | |||
| JPH05257105A | 1993-10-08 | |||
| JPH047826A | 1992-01-13 |
Attorney, Agent or Firm:
KAWAKITA, Kijuro et al. (JP)
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