Title:
STRAIN SENSING FILM, PRESSURE SENSOR AND STRAIN SENSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/185000
Kind Code:
A1
Abstract:
A strain sensing film, a pressure sensor and a strain sensing system. The strain sensing film comprises a semiconductor thin film (20). A temperature sensor (203) is provided in the semiconductor thin film (20) to obtain a more accurate sensing film temperature, and the sensitivity of the strain sensing film is corrected in combination with an effective sensitivity coefficient and temperature relationship table obtained from a calibration test so as to achieve better effective sensitivity coefficient compensation. The strain sensing film may make full use of the high sensitivity of a semiconductor thin film strain gauge, and may be widely used in application scenes in which local strain or changes in strain, force or changes in force, pressure or changes in pressure, displacement, deformation, or bending need to be measured.
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Inventors:
YU JINBO (CN)
CHEN ZHIYUN (CN)
ZHU CHANGFENG (CN)
LI HAO (CN)
CHEN ZHIYUN (CN)
ZHU CHANGFENG (CN)
LI HAO (CN)
Application Number:
PCT/CN2021/075912
Publication Date:
September 23, 2021
Filing Date:
February 08, 2021
Export Citation:
Assignee:
SHENZHEN NEW DEGREE TECH CO LTD (CN)
International Classes:
G01L1/22; G01L19/04
Domestic Patent References:
| WO2015038320A1 | 2015-03-19 | |||
| WO2018231808A1 | 2018-12-20 |
Foreign References:
| CN1049718A | 1991-03-06 | |||
| CN101639391A | 2010-02-03 | |||
| CN109238525A | 2019-01-18 | |||
| CN109781314A | 2019-05-21 | |||
| CN109844447A | 2019-06-04 | |||
| CN209264161U | 2019-08-16 | |||
| US20100307255A1 | 2010-12-09 |
Attorney, Agent or Firm:
SHENZHEN ZHONGYI UNION INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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