Title:
SUB-APERTURE CENTER LIQUID SUPPLY OPTICAL SURFACE SERIES MACHINING TECHNOLOGY AND TOOL
Document Type and Number:
WIPO Patent Application WO/2021/135452
Kind Code:
A1
Abstract:
A sub-aperture center liquid supply optical surface machining tool comprising an elastic coupling (1), a polishing disk (3) and a polishing pad (5), wherein two ends of the elastic coupling (1) are connected to the polishing disk (3) and a rotating shaft (6) respectively, and different grinding and polishing pads and polishing pads are replaced on the same machining tool to achieve successive recursive suppression processes of low frequency, intermediate frequency and high frequency errors of the optical surface. At the same time, in order to obtain a high-quality, low-damage ultra-precision smooth surface, a combination application of different polishing pads for grinding and polishing removes a residual sub-surface damage layer after the surface is polished in the previous process, at the same time, new sub-surface damage is no longer formed, and the sub-surface damage is reduced to a minimum after repeated machining. A sub-aperture center liquid supply optical surface series machining technology is further involved. The series machining technology is based on a system technological method of fluid dynamic pressure principle from a blank surface to an ultra-smooth surface. The series machining technology mainly comprises a fluid dynamic pressure consolidation abrasive grinding and polishing process, a central liquid supply small grinding head polishing process and a disc type fluid dynamic pressure polishing process.
Inventors:
LIN BIN (CN)
JIANG XIANGMIN (CN)
CAO ZHONGCHEN (CN)
HUANG TIAN (CN)
LI SHIPENG (CN)
JIANG XIANGMIN (CN)
CAO ZHONGCHEN (CN)
HUANG TIAN (CN)
LI SHIPENG (CN)
Application Number:
PCT/CN2020/117858
Publication Date:
July 08, 2021
Filing Date:
September 25, 2020
Export Citation:
Assignee:
UNIV TIANJIN (CN)
International Classes:
B24B1/00; B24B37/11; B24B13/01; B24B37/34; B24B57/02
Foreign References:
| CN111070080A | 2020-04-28 | |||
| CN107344329A | 2017-11-14 | |||
| CN102765044A | 2012-11-07 | |||
| CN105538120A | 2016-05-04 | |||
| CN107745324A | 2018-03-02 | |||
| CN110480497A | 2019-11-22 | |||
| KR101994608B1 | 2019-07-02 | |||
| JP2016159416A | 2016-09-05 |
Attorney, Agent or Firm:
BEI & OCEAN (CN)
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