Title:
SUBMERGED PLASMA COATING APPARATUS, ELECTRODE FOR SUBMERGED PLASMA, AND COATING METHOD USING SUBMERGED PLASMA
Document Type and Number:
WIPO Patent Application WO/2009/110625
Kind Code:
A1
Abstract:
Disclosed is a submerged plasma coating apparatus having: a container (1) that is capable of containing a substrate (S) and a liquid (L) that includes raw material, an electrode for submerged plasma (2) that is provided in the container (1), and a power supply apparatus (3) that supplies power to the electrode for submerged plasma (2). The electrode for submerged plasma (2) comprises: a main electrode (21) having a discharging end (22); a sub-electrode (26) that faces the discharging end (22) and is also provided between the discharging end (22) and the substrate (S), which face one another; and a plasma generator (29) that has a space partitioned off by a surface (22a) of the discharging end (22) and a surface (26a) of the sub-electrode (26) that faces the surface (22a), and generates plasma in the space by power supplied from the main electrode (21). The plasma generated by the plasma generator (29) is brought into contact with the substrate (S), and degradation components of the raw material are deposited on the surface of the substrate (S). The structure enables plasma to be generated in a liquid without using a second electrode as a substrate.
Inventors:
SHIBATA KENJI (JP)
SHIMO TOSHIHISA (JP)
KUMAGAI KYOKO (JP)
HAYASHI HIDETAKA (JP)
OKUDA SHINYA (JP)
NOMURA SHINFUKU (JP)
TOYOTA HIROMICHI (JP)
SHIMO TOSHIHISA (JP)
KUMAGAI KYOKO (JP)
HAYASHI HIDETAKA (JP)
OKUDA SHINYA (JP)
NOMURA SHINFUKU (JP)
TOYOTA HIROMICHI (JP)
Application Number:
PCT/JP2009/054365
Publication Date:
September 11, 2009
Filing Date:
March 02, 2009
Export Citation:
Assignee:
TOYOTA JIDOSHOKKI KK (JP)
NAT UNIVERSITY CORP EHIME UNIV (JP)
SHIBATA KENJI (JP)
SHIMO TOSHIHISA (JP)
KUMAGAI KYOKO (JP)
HAYASHI HIDETAKA (JP)
OKUDA SHINYA (JP)
NOMURA SHINFUKU (JP)
TOYOTA HIROMICHI (JP)
NAT UNIVERSITY CORP EHIME UNIV (JP)
SHIBATA KENJI (JP)
SHIMO TOSHIHISA (JP)
KUMAGAI KYOKO (JP)
HAYASHI HIDETAKA (JP)
OKUDA SHINYA (JP)
NOMURA SHINFUKU (JP)
TOYOTA HIROMICHI (JP)
International Classes:
C23C16/50; H05H1/24; C01B31/02
Domestic Patent References:
| WO2006107002A1 | 2006-10-12 |
Foreign References:
| JP2004512430A | 2004-04-22 | |||
| JP2006274426A | 2006-10-12 |
Other References:
SHINFUKU NOMURA ET AL.: "Ekichu Plasma Sochi ni Okeru Denkyoku Keijo no Saitekika ni Kansuru Kenkyu", THE JAPAN SOCIETY OF MECHANICAL ENGINEERS KOEN RONBUNSHU, 2007, pages 217 - 218
Attorney, Agent or Firm:
OHKAWA, Hiroshi (Nakamura-ku Nagoya-shi, Aichi, JP)
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