Title:
SUBSTRATE-CONVEYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/005246
Kind Code:
A9
Abstract:
One problem associated with substrate-conveying devices is that, when a first substrate (1) has been placed on a supply lift (11) and is being conveyed from an upper workbench (10) to a lower workbench (20), a wait is imposed on a second substrate (2) which has finished undergoing an ultraviolet cleaning process on the upper workbench (10) as shown in Figure 2, and, consequently, productivity is reduced due to the delay in supplying other substrates through a supply and discharge part (15). The present invention comprises a substrate-conveying device in which a substrate supplied from an upper first position is conveyed to a height at a lower second position, and the substrate which has been conveyed to the second lower position is moved and discharged by means of a conveying rail; wherein the substrate-conveying device is constructed in such a way that first and second upper rotational supports and first and second lower rotational supports rotate in a state in which they are spaced apart from each other vertically.
Inventors:
SHIN DONG-HYUK (KR)
Application Number:
PCT/KR2009/003759
Publication Date:
July 08, 2010
Filing Date:
July 09, 2009
Export Citation:
Assignee:
INATECH CO LTD (KR)
SHIN DONG-HYUK (KR)
SHIN DONG-HYUK (KR)
International Classes:
H01L21/68
Attorney, Agent or Firm:
Y.P. LEE, MOCK & PARTNERS (KR)
리앤목 특허법인 (KR)
리앤목 특허법인 (KR)
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