Title:
SUBSTRATE FOR GROWTH OF CARBON NANOTUBE, METHOD FOR GROWTH OF CARBON NANOTUBE, METHOD FOR CONTROL OF PATICLE DIAMETER OF CATALYST FOR GROWTH OF CARBON NANOTUBE, AND METHOD FOR CONTROL CARBON NANOTUBE DIAMETER
Document Type and Number:
WIPO Patent Application WO/2007/139086
Kind Code:
A1
Abstract:
A substrate for the growth of a carbon nanotube having a catalyst layer microparticulated by using an arc plasma gun. CNT is grown on the catalyst layer by thermal CVD or remote plasma CVD. The particle diameter of the catalyst for the growth of CNT is regulated by the number of shots of the arc plasma gun. CNT is grown on the catalyst layer having a regulated catalyst particle diameter by thermal CVD or remote plasma CVD to regulate the inner diameter or outer diameter of CNT.
Inventors:
NAKANO HARUHISA (JP)
YAMAZAKI TAKAHISA (JP)
MURAKAMI HIROHIKO (JP)
YAMAZAKI TAKAHISA (JP)
MURAKAMI HIROHIKO (JP)
Application Number:
PCT/JP2007/060859
Publication Date:
December 06, 2007
Filing Date:
May 29, 2007
Export Citation:
Assignee:
ULVAC INC (JP)
NAKANO HARUHISA (JP)
YAMAZAKI TAKAHISA (JP)
MURAKAMI HIROHIKO (JP)
NAKANO HARUHISA (JP)
YAMAZAKI TAKAHISA (JP)
MURAKAMI HIROHIKO (JP)
International Classes:
C01B31/02; B01J23/755; B01J33/00; C23C14/24
Foreign References:
| JP2000096212A | 2000-04-04 | |||
| JP2006315882A | 2006-11-24 | |||
| JP2006315881A | 2006-11-24 | |||
| JP2007070158A | 2007-03-22 |
Other References:
NAGAO H. ET AL.: "Microwave Plasma CVD-ho o Mochiita Komitsudo Carbon Nanotube Maku no Sakusei", PLASMA SCIENCE SYMPOSIUM 2005 / THE 22ND SYMPOSIUM ON PLASMA PROCESSING PROCEEDINGS, 2005, pages 367 - 368, XP003019610
NAKANO Y. ET AL.: "Carbon Nanotube Seimaku Process no Kaihatsu", ULVAC TECHNICAL JOURNAL, no. 64, 17 March 2006 (2006-03-17), pages 12 - 15, XP003019611
AGAWA Y.: "Arc Plasma Gun ni yoru Nano Usumaku, Nano Ryushi no Keisei ni Tsuite", ULVAC TECHNICAL JOURNAL, no. 65, 22 September 2006 (2006-09-22), pages 1 - 5, XP003019612
NAKANO Y. ET AL.: "Arc Plasma Gun o Riyo shita CNT no Chokkei Seigyo", SOCIETY OF NANO SCIENCE AND TECHNOLOGY DAI 5 KAI TAIKAI KOEN YOKOSHU, 21 May 2007 (2007-05-21), pages 120, XP003019613
NAKANO Y. ET AL.: "Carbon Nanotube Seimaku Process no Kaihatsu", ULVAC TECHNICAL JOURNAL, no. 64, 17 March 2006 (2006-03-17), pages 12 - 15, XP003019611
AGAWA Y.: "Arc Plasma Gun ni yoru Nano Usumaku, Nano Ryushi no Keisei ni Tsuite", ULVAC TECHNICAL JOURNAL, no. 65, 22 September 2006 (2006-09-22), pages 1 - 5, XP003019612
NAKANO Y. ET AL.: "Arc Plasma Gun o Riyo shita CNT no Chokkei Seigyo", SOCIETY OF NANO SCIENCE AND TECHNOLOGY DAI 5 KAI TAIKAI KOEN YOKOSHU, 21 May 2007 (2007-05-21), pages 120, XP003019613
Attorney, Agent or Firm:
EXEO Patent & Trademark Company (Ebisu Lite Bldg.1-19, Ebisuminami 3-chom, Shibuya-ku Tokyo 22, JP)
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