Title:
SUBSTRATE HANDLING SYSTEM
Document Type and Number:
WIPO Patent Application WO2004106008
Kind Code:
A3
Abstract:
A substrate handling system and method in which an air chuck produces a flim of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate.
Inventors:
SHAVER NORMAN L (US)
ELLIS TIMOTHY A (US)
HILL DAVID R (US)
ELLIS TIMOTHY A (US)
HILL DAVID R (US)
Application Number:
PCT/US2004/017188
Publication Date:
February 02, 2006
Filing Date:
May 28, 2004
Export Citation:
Assignee:
PERKINELMER INC (US)
SHAVER NORMAN L (US)
ELLIS TIMOTHY A (US)
HILL DAVID R (US)
SHAVER NORMAN L (US)
ELLIS TIMOTHY A (US)
HILL DAVID R (US)
International Classes:
B41C1/00; B65H3/16; B65H5/04; C23C16/00; B41C1/05; B25J; (IPC1-7): B65H3/16
Foreign References:
| US4600349A | 1986-07-15 | |||
| US20010015520A1 | 2001-08-23 |
Other References:
See also references of EP 1628807A4
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