Title:
SUBSTRATE HOLDING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/111097
Kind Code:
A1
Abstract:
A substrate holding apparatus (10) is provided to be used for a vacuum film forming tank (1). The substrate holding apparatus is provided with a drive source (14) arranged outside the vacuum film forming tank (1); a drive member (13) which is attached to the drive source (14) and airtightly and slidably arranged on the vacuum film forming tank (1); and a substrate holder (11) which is attached to the drive member (13) and has substantially circular outer circumference in plain view and a flat plate shape in side plain view. The drive source (14) reciprocates the drive member (13) by transmitting drive force to the drive member (13) and swings the substrate holder (11) in the thickness direction without rotating the holder.
Inventors:
NOSE KOUICHI
SASAGAWA KOICHI
KOIZUMI YASUHIRO
IWASAKI YASUKUNI
SASAGAWA KOICHI
KOIZUMI YASUHIRO
IWASAKI YASUKUNI
Application Number:
PCT/JP2007/054412
Publication Date:
October 04, 2007
Filing Date:
March 07, 2007
Export Citation:
Assignee:
SHINMAYWA IND LTD (JP)
NOSE KOUICHI
SASAGAWA KOICHI
KOIZUMI YASUHIRO
IWASAKI YASUKUNI
NOSE KOUICHI
SASAGAWA KOICHI
KOIZUMI YASUHIRO
IWASAKI YASUKUNI
International Classes:
C23C14/50; H01L21/285
Foreign References:
| JPH01168551U | 1989-11-28 | |||
| JPH0925574A | 1997-01-28 | |||
| JPH05295540A | 1993-11-09 | |||
| JPS6270568A | 1987-04-01 | |||
| JPH09143717A | 1997-06-03 |
Attorney, Agent or Firm:
SUMIDA, Yoshihiro et al. (3rd Fl. Bo-eki Bldg.123-1, Higashimachi, Chuo-ku, Kobe-shi Hyogo 31, JP)
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