Title:
SUBSTRATE HOLDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/196017
Kind Code:
A1
Abstract:
Provided is a substrate holding device with which the deflection of a substrate to be held, caused by the substrate's own weight, can be remedied. Specifically, this substrate holding device for holding a substrate is characterized by comprising: a substrate support part that supports the substrate from a bottom surface side; a substrate pressing part that presses the substrate from a top surface side; and a movement part that relatively moves the substrate support part and the substrate pressing part in a thickness direction of the substrate. The substrate holding device is also characterized in that the substrate pressing part presses the substrate downward from the top surface side at a position offset more toward the outside than an area at which the substrate is supported by the substrate support part.
Inventors:
YAMASHITA GENKI (JP)
Application Number:
PCT/JP2021/047840
Publication Date:
September 22, 2022
Filing Date:
December 23, 2021
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
TASMIT INC (JP)
TASMIT INC (JP)
International Classes:
H01L21/683
Foreign References:
| JP2019044249A | 2019-03-22 | |||
| JPH0982785A | 1997-03-28 | |||
| US20170018451A1 | 2017-01-19 |
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