Title:
SUBSTRATE-LEVITATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2004/096679
Kind Code:
A1
Abstract:
A contact member (13) provided on the top of a support member (10) is lifted by a lifting mechanism (6) with a substrate (2) levitated. This causes the contact member (13) to be in contact with the back face of the substrate (2), limiting the movement of the substrate (2) being levitated.
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Inventors:
OKAHIRA HIROYUKI (JP)
Application Number:
PCT/JP2004/006000
Publication Date:
November 11, 2004
Filing Date:
April 26, 2004
Export Citation:
Assignee:
OLYMPUS CORP (JP)
OKAHIRA HIROYUKI (JP)
OKAHIRA HIROYUKI (JP)
International Classes:
B65G49/06; B65G49/07; H01L21/683; H01L21/687; (IPC1-7): B65G49/06; H01L21/68
Foreign References:
| JP2003040422A | 2003-02-13 | |||
| JPH0514034U | 1993-02-23 |
Attorney, Agent or Firm:
Suzuye, Takehiko c/o SUZUYE & SUZUYE (7-2 Kasumigaseki 3-chome, Chiyoda-k, Tokyo 13, JP)
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