Title:
SUBSTRATE AND METHOD FOR MONITORING BOUNDARY POSITION OF FILM LAYER ON SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2021/097991
Kind Code:
A1
Abstract:
A substrate (1) and a method for monitoring the boundary position of a film layer (11) on the substrate (1). Multiple sets of positioning units (20) are provided in a non-display area (B) of a substrate (1), and each set of positioning units (20) comprises at least two first-level positioning marks (210) and first-level positioning scales (211) corresponding thereto. At least two second-level positioning marks (220) and second-level positioning scales (221) corresponding thereto are provided between two adjacent first-level positioning marks (210). The specific position of the boundary of a film layer (11) is determined according to the readings of the positioning scales (211, 221) of the multiple sets of positioning units (20) corresponding to the boundary of the film layer (11).
Inventors:
YU YUN (CN)
LU HUAJUN (CN)
YAN YUE (CN)
LU HUAJUN (CN)
YAN YUE (CN)
Application Number:
PCT/CN2019/126541
Publication Date:
May 27, 2021
Filing Date:
December 19, 2019
Export Citation:
Assignee:
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD (CN)
International Classes:
G02F1/13; G02F1/1337
Foreign References:
| CN104597642A | 2015-05-06 | |||
| CN104597642A | 2015-05-06 | |||
| CN107039305A | 2017-08-11 | |||
| CN107039305A | 2017-08-11 | |||
| CN104698694A | 2015-06-10 | |||
| CN105974638A | 2016-09-28 | |||
| CN106873223A | 2017-06-20 | |||
| CN108183123A | 2018-06-19 | |||
| US10162273B2 | 2018-12-25 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD (CN)
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