Title:
SUBSTRATE-MOUNTING BOAT
Document Type and Number:
WIPO Patent Application WO/2013/179481
Kind Code:
A1
Abstract:
A substrate-mounting boat having a substrate plate that can be fixed to a suction bar by vacuum suction, a substrate being vertically mounted on the substrate plate, wherein: the substrate plate has two principal surfaces opposite each other; a mounting region for mounting the substrate is defined on at least one of the two principal surfaces; a recess region, which is lower than the surroundings, is formed in the region remaining after the mounting region is defined; and a suction region, with which the suction port of the suction bar comes into contact, is defined within a region, opposite the recess region, of the other principal surface opposite the principal surface on which the mounting region is defined.
Inventors:
HIGASHI MASAHISA (JP)
TAKEDA NAOYA (JP)
TANAKA SUGURU (JP)
TAKEDA NAOYA (JP)
TANAKA SUGURU (JP)
Application Number:
PCT/JP2012/064284
Publication Date:
December 05, 2013
Filing Date:
June 01, 2012
Export Citation:
Assignee:
SHIMADZU CORP (JP)
HIGASHI MASAHISA (JP)
TAKEDA NAOYA (JP)
TANAKA SUGURU (JP)
HIGASHI MASAHISA (JP)
TAKEDA NAOYA (JP)
TANAKA SUGURU (JP)
International Classes:
H01L21/02; H01L21/31; H01L21/683
Foreign References:
| JPH01161846A | 1989-06-26 | |||
| JPH01194317A | 1989-08-04 | |||
| JPH01321191A | 1989-12-27 |
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (JP)
Hidekazu Miyoshi (JP)
Hidekazu Miyoshi (JP)
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