Title:
SUBSTRATE PROCESSING APPARATUS MANAGEMENT SYSTEM, ASSISTANCE APPARATUS, SUBSTRATE PROCESSING APPARATUS, INTER-CHAMBER PERFORMANCE COMPARISON METHOD, AND INTER-CHAMBER PERFORMANCE COMPARISON PROGRAM
Document Type and Number:
WIPO Patent Application WO/2023/162856
Kind Code:
A1
Abstract:
This substrate processing apparatus management system comprises: an information analysis apparatus comprising a model generation unit that generates a representative model indicating correlations between a plurality of processing information items indicating an operation or state related to processing of a substrate in a representative chamber among a plurality of chambers; and an assistance apparatus that acquires a plurality of processing information items in respective ones of the plurality of chambers, and that generates assistance information regarding maintenance work for another chamber on the basis of comparative information obtained by comparing the correlations among a plurality of processing information items in the other chamber with the representative model.
Inventors:
NAKANO YUTA (JP)
HORIGUCHI HIROSHI (JP)
SEIWA TAKAAKI (JP)
MATSUI HIROAKIRA (JP)
INAGI DAI (JP)
UENO TOMOHIRO (JP)
YOSHIHARA KOKI (JP)
ONO TAKUYA (JP)
HORIGUCHI HIROSHI (JP)
SEIWA TAKAAKI (JP)
MATSUI HIROAKIRA (JP)
INAGI DAI (JP)
UENO TOMOHIRO (JP)
YOSHIHARA KOKI (JP)
ONO TAKUYA (JP)
Application Number:
PCT/JP2023/005509
Publication Date:
August 31, 2023
Filing Date:
February 16, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/02; H01L21/304
Domestic Patent References:
| WO2020152795A1 | 2020-07-30 | |||
| WO2003105210A1 | 2003-12-18 |
Foreign References:
| JP2002270581A | 2002-09-20 | |||
| JP2014022695A | 2014-02-03 | |||
| JP2022003664A | 2022-01-11 | |||
| JP2021168364A | 2021-10-21 | |||
| JP2005033090A | 2005-02-03 | |||
| JP2002025981A | 2002-01-25 | |||
| JP2010219263A | 2010-09-30 |
Attorney, Agent or Firm:
NAKAGAWA, Masahiro et al. (JP)
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