Title:
SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/182113
Kind Code:
A1
Abstract:
In the present invention, a carrier is conveyed along a first conveyance path. A plurality of substrates in the carrier are processed. A first standby unit is provided adjacent to a start point of the first conveyance path The first standby unit passes a carrier in which a plurality of unprocessed substrates are housed to the start point of the first conveyance path. A second standby unit is provided adjacent to an end point of the first conveyance path. The second standby unit receives the carrier in which the plurality of substrates, which have been processed, are housed. The plurality of substrates are removed from the carrier. After use, the carrier is picked up from a standby conveyance path connecting the second standby unit and the first standby unit, and then cleaned. The cleaned carrier is returned to the standby conveyance path.
Inventors:
AMAHISA KENJI (JP)
TANIGUCHI SHINICHI (JP)
IWASAKI AKIHIRO (JP)
TANIGUCHI SHINICHI (JP)
IWASAKI AKIHIRO (JP)
Application Number:
PCT/JP2023/010193
Publication Date:
September 28, 2023
Filing Date:
March 15, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/677; B65G49/07; H01L21/304; H01L21/306
Foreign References:
| JPH0817894A | 1996-01-19 | |||
| JP2013051267A | 2013-03-14 |
Attorney, Agent or Firm:
NAKAGAWA, Masahiro et al. (JP)
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