Title:
SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/182115
Kind Code:
A1
Abstract:
A substrate processing apparatus comprising: a substrate loading/unloading unit; and a conveyance unit and a processing unit that are provided so as to extend in parallel from the substrate loading/unloading unit unit in a first direction. The conveyance unit conveys a carrier, which houses unprocessed substrates, from the substrate loading/unloading unit in the first direction. The processing unit includes a plurality of processing tanks. In the processing unit, the carrier in which the plurality of substrates are housed is conveyed in a second direction opposite to the first direction. The conveyed carrier is immersed in at least one of a plurality of processing liquids stored in the plurality of processing tanks. A maintenance space is formed so as to be adjacent to the processing unit in a plan view. The conveyance unit partially overlaps at least a part of the processing unit and the maintenance space in plan view.
Inventors:
AMAHISA KENJI (JP)
TANIGUCHI SHINICHI (JP)
IWASAKI AKIHIRO (JP)
TANIGUCHI SHINICHI (JP)
IWASAKI AKIHIRO (JP)
Application Number:
PCT/JP2023/010208
Publication Date:
September 28, 2023
Filing Date:
March 16, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/677; H01L21/304; H01L21/306
Foreign References:
| JP2002359225A | 2002-12-13 | |||
| JP2013051267A | 2013-03-14 | |||
| US20060144822A1 | 2006-07-06 | |||
| JPH0817894A | 1996-01-19 |
Attorney, Agent or Firm:
NAKAGAWA, Masahiro et al. (JP)
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