Title:
SUBSTRATE PROCESSING SYSTEM, SCHEDULE CREATING METHOD, STORAGE MEDIUM, AND SCHEDULE CREATING PROGRAM
Document Type and Number:
WIPO Patent Application WO/2024/063004
Kind Code:
A1
Abstract:
The present invention provides a substrate processing system that is capable of suppressing usage amount of utility. A substrate processing system (1000) includes a substrate processing device (200) and a control device (300). The control device (300) creates a schedule (SK) for actions of the substrate processing device (200). The control device (300) includes a storage unit (303) and a control unit (304). The storage unit (303) stores a plurality of trained models for creating a plurality of schedules (SK) in which usage amount of utility differs from each other. The control unit (304) is capable of creating the plurality of schedules (SK) on the basis of the plurality of trained models. Each of the plurality of trained models is built by executing reinforcement learning on the basis of input data at the time of learning. The input data at the time of learning includes count information, recipe information, and utility information (RS). The utility information (RS) indicates the usage amount of utility used in each action included in procedures of the actions of the substrate processing device (200).
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Inventors:
YAMAMOTO SHINJI (JP)
HORIGUCHI HIROSHI (JP)
HORIGUCHI HIROSHI (JP)
Application Number:
PCT/JP2023/033518
Publication Date:
March 28, 2024
Filing Date:
September 14, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/02; G06N3/08
Foreign References:
| JP2001102425A | 2001-04-13 | |||
| JP2020205338A | 2020-12-24 | |||
| JP2022523870A | 2022-04-26 | |||
| JP2022107939A | 2022-07-25 | |||
| JP2016139667A | 2016-08-04 | |||
| JP2003031454A | 2003-01-31 |
Attorney, Agent or Firm:
MAEI Hiroyuki (JP)
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