Title:
SUBSTRATE SUCTION/HOLDING STRUCTURE AND SUBSTRATE TRANSFER ROBOT
Document Type and Number:
WIPO Patent Application WO/2021/131160
Kind Code:
A1
Abstract:
A substrate suction/holding structure (100) comprises: a conductive pad body (40) having an annular contact portion (41) and a bottom wall portion (43) that closes the bottom surface (65) of a first vacuum chamber (42) which is surrounded by the contact portion; a conductive blade body (3) having a top surface and a second vacuum chamber (30) that is formed by depressing the top surface; a conductive pillar (44) that is provided in either the second vacuum chamber or the pad body, positions the contact portion of the pad body above the top surface of the blade body above the second vacuum chamber, and supports the pad body so that the pad body can be rocked with respect to the second vacuum chamber; a covering body (7) that is fixed to the blade body and covers the second vacuum chamber; and a suction path (10) that extends from the first vacuum chamber and passes through the bottom wall of the pad body, the second vacuum chamber, and the blade body in that order, and is connected to a vacuum source (8).
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Inventors:
YOSHIDA MASAYA
NAKAHARA HAJIME
NAKAHARA HAJIME
Application Number:
PCT/JP2020/032455
Publication Date:
July 01, 2021
Filing Date:
August 27, 2020
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
KAWASAKI ROBOTICS USA INC (US)
KAWASAKI ROBOTICS USA INC (US)
International Classes:
B23Q3/08; H01L21/677
Foreign References:
| JP2011029388A | 2011-02-10 | |||
| JP6568986B1 | 2019-08-28 |
Attorney, Agent or Firm:
ARCO PATENT & TRADEMARK ATTORNEYS (JP)
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