Title:
SUBSTRATE SUPPORT DEVICE, SCREEN PRINTING DEVICE, COATING DEVICE, SURFACE MOUNTING MACHINE, AND BACKUP PIN ARRANGEMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2017/187513
Kind Code:
A1
Abstract:
Provided is a substrate support device 15 that supports a substrate 12 from below using a backup pin 20. The substrate support device 15 is provided with: a backup plate 21 having a plurality of pin insertion holes 21A into which backup pins 20 are to be inserted to be movable to a raised position and a lowered position; an raising and lowering part 23 that raises and lowers the backup plate 21; a lower plate 24 (pin raising part) that moves all the backup pins 20 at the lowered position among the backup pins 20 inserted into the pin insertion holes 21A to the raised position; O-rings 31 (pin retaining parts) that retain the backup pins 20 at the raised position; and a pin lowering part 27 that moves the backup pins 20 not used for backup of the substrate 12 among the backup pins 20 retained at the raised position to the lowered position.
Inventors:
SUGAHARA KAZUYUKI (JP)
Application Number:
PCT/JP2016/063060
Publication Date:
November 02, 2017
Filing Date:
April 26, 2016
Export Citation:
Assignee:
YAMAHA MOTOR CO LTD (JP)
International Classes:
B41F15/26; B05C13/00; B41F15/08; H01L21/683; H05K3/34; H05K13/04
Foreign References:
| JP2010143085A | 2010-07-01 | |||
| JPH0799400A | 1995-04-11 | |||
| JP2009146945A | 2009-07-02 | |||
| JP2006093243A | 2006-04-06 | |||
| JP2004006451A | 2004-01-08 | |||
| JP2009115725A | 2009-05-28 |
Attorney, Agent or Firm:
AKATSUKI UNION PATENT FIRM (JP)
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