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Title:
SUBSTRATE FOR SURFACE ACOUSTIC WAVE ELEMENT, AND METHOD FOR MANUFACTURING SAID SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2020/040203
Kind Code:
A1
Abstract:
Provided is a substrate for a surface acoustic wave element, the substrate comprising a piezoelectric material and having a chamfered part on the outer peripheral surface, wherein the arithmetic mean roughness Ra1 of a roughness curve in the thickness direction of the outer peripheral surface and the arithmetic mean roughness Ra2 of a roughness curve in the circumferential direction of the outer peripheral surface are both less than or equal to 1 μm, and Ra1/Ra2 is greater than or equal to 1.2.

Inventors:
NISHI KENICHI (JP)
SHIMIZU YOSUKE (JP)
Application Number:
PCT/JP2019/032656
Publication Date:
February 27, 2020
Filing Date:
August 21, 2019
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/304; C30B33/00; H03H3/08
Foreign References:
JPH04196803A1992-07-16
JP2001332949A2001-11-30
JP2002111420A2002-04-12
JP2001130997A2001-05-15
JPH01273368A1989-11-01
JP2002167298A2002-06-11
JPH09181021A1997-07-11
JPH11284469A1999-10-15
JPH08125486A1996-05-17
JPS59140714A1984-08-13
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
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