Title:
SUBSTRATE TRANSFER APPARATUS AND OPERATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/249260
Kind Code:
A1
Abstract:
The present invention relates to a substrate transfer apparatus detecting a collision of an end-effector, and an operation method thereof. The substrate transfer apparatus comprises: an end-effector for supporting a substrate; a motor for providing power for moving the end-effector; a collision detection unit for detecting a collision of the end-effector; and a control unit for controlling the driving of the motor according to the collision detection of the collision detection unit. The collision detection unit may comprise: a torque measurement unit for measuring a torque value of the motor; a difference value calculation unit for calculating a torque difference value between two torque measurement values measured with a time lag therebetween; and a collision determination unit for determining a collision of the end-effector on the basis of the torque difference value.
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Inventors:
BAE HYEONG HWAN (KR)
SONG BYOUNG GYU (KR)
MIN JUNG KI (KR)
KO HYEONG SIK (KR)
SONG BYOUNG GYU (KR)
MIN JUNG KI (KR)
KO HYEONG SIK (KR)
Application Number:
PCT/KR2023/006840
Publication Date:
December 28, 2023
Filing Date:
May 19, 2023
Export Citation:
Assignee:
EUGENE TECHNOLOGY CO LTD (KR)
International Classes:
H01L21/67; B25J11/00; B25J13/08; H01L21/677; H01L21/687
Foreign References:
| KR101861135B1 | 2018-05-25 | |||
| KR101329853B1 | 2013-11-14 | |||
| KR20180029367A | 2018-03-21 | |||
| KR20170052298A | 2017-05-12 | |||
| KR101576634B1 | 2015-12-14 |
Attorney, Agent or Firm:
AHN, Joon-Hyung (KR)
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