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Title:
SUBSTRATE TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2002/047871
Kind Code:
A1
Abstract:
A method for accurately transferring a substrate by a robot arm in a vacuum, comprising the steps of detecting the extended amount of the robot arm for transferring the substrate (4) in the vacuum, and feeding back the extended amount to the drive device (10) of the robot arm to correct an arm drive amount each time the specified number of substrates is transferred or when the extended amount exceeds a specified value.

Inventors:
TSUGUEDA TAKAYUKI
SUNAGA YOSHIO
MATSUDAI MASASUKE
SHISHIKURA MASATO
OOZORA HIROKI
Application Number:
PCT/JP2001/010544
Publication Date:
June 20, 2002
Filing Date:
December 03, 2001
Export Citation:
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Assignee:
ULVAC INC (JP)
International Classes:
B25J9/10; B65G49/00; B65G49/06; B65G49/07; H01L21/677; (IPC1-7): B25J9/10
Foreign References:
JPH04294984A1992-10-19
JPH0714908A1995-01-17
JPH0285709A1990-03-27
JPH06326172A1994-11-25
JPH08202421A1996-08-09
JPH01264786A1989-10-23
US5400638A1995-03-28
JPH06246658A1994-09-06
Attorney, Agent or Firm:
Kitamura, Kinichi (Shinbashi 2-chome Minato-Ku, Tokyo, JP)
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