SUBSTRATE TRANSPORT CARRIAGE - SHIBAURA MECHATRONICS CORP

Title:

SUBSTRATE TRANSPORT CARRIAGE

Document Type and Number:

WIPO Patent Application WO/2023/127554

Kind Code:

A1

Abstract:

Provided is a substrate transport carriage capable of transporting a substrate between processing apparatuses while maintaining a wet condition of the surface of the substrate. A substrate transport carriage of an embodiment comprises: a tank 110 in which a plurality of substrates W can be stored in a water-immersed state and in a direction allowing for removal from above, the substrates W being spaced apart from each other and stacked and housed in a cassette 4; and a transport unit 120 that can travel with the tank 110 mounted thereon.

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Inventors:

KATO SHUN (JP)
FUTATSUKAWA SHINJI (JP)
ARAI RIE (JP)
NISHIBE YUKINOBU (JP)

Application Number:

PCT/JP2022/046445

Publication Date:

July 06, 2023

Filing Date:

December 16, 2022

Export Citation:

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Assignee:

SHIBAURA MECHATRONICS CORP (JP)

International Classes:

H01L21/677; B08B3/02; B62B3/00; B65G1/00; B65G49/07; H01L21/673

Foreign References:

CN111112221A	2020-05-08
JP2008218885A	2008-09-18
JPH0864570A	1996-03-08
JPH05160101A	1993-06-25
JP2000109994A	2000-04-18

Attorney, Agent or Firm:

KIUCHI Mitsuharu et al. (JP)

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