Title:
SUBSTRATE TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/033186
Kind Code:
A1
Abstract:
A substrate treatment apparatus, comprising a box-shaped treatment tank (11) having an opening part at its upper side and a cover body (21) openably covering the opening part of the treatment tank. The cover body (21) is characterized in that a drying chamber (23) storing and drying a treated substrate (W) is formed therein, the treatment tank (11) is so formed that at least three of treatment fluid feed nozzle tubes (14a) to (14c) and (14a') to (14c') are disposed at each of the opposed side wall faces thereof forming the box shape horizontally at specified intervals and these feed nozzle tubes (14a) to (14c) and (14a') to (14c') are formed to be connected to a switching mechanism to supply a treatment fluid from the opposed side wall sides while alternately switching them at the opposed side wall faces. Thus, the treatment of various types of chemical liquids, flushing, and drying can be performed in the same treatment tank.
Inventors:
NAKATSUKASA KATSUYOSHI (JP)
YAMAGUCHI HIROSHI (JP)
OGASAWARA KAZUHISA (JP)
KIZAWA HIROSHI (JP)
YAMAGUCHI HIROSHI (JP)
OGASAWARA KAZUHISA (JP)
KIZAWA HIROSHI (JP)
Application Number:
PCT/JP2005/009331
Publication Date:
March 30, 2006
Filing Date:
May 23, 2005
Export Citation:
Assignee:
SES CO LTD (JP)
NAKATSUKASA KATSUYOSHI (JP)
YAMAGUCHI HIROSHI (JP)
OGASAWARA KAZUHISA (JP)
KIZAWA HIROSHI (JP)
NAKATSUKASA KATSUYOSHI (JP)
YAMAGUCHI HIROSHI (JP)
OGASAWARA KAZUHISA (JP)
KIZAWA HIROSHI (JP)
International Classes:
H01L21/304; B08B3/02; B08B3/08; B08B3/12; B08B9/08; (IPC1-7): H01L21/304; B08B3/02; B08B3/08; B08B3/12; B08B9/08
Foreign References:
| JPH10209109A | 1998-08-07 | |||
| JP2004095710A | 2004-03-25 | |||
| JPH10335295A | 1998-12-18 | |||
| JPH07185483A | 1995-07-25 |
Attorney, Agent or Firm:
Win, Tech Patent Office (Wenping Kanda Bldg. 6-7, Kanda Kajicho 3-chome, Chiyoda-ku Tokyo, JP)
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