Title:
SUBSTRATE WITH β-TYPE GALLIUM OXIDE NANO-RODS, MANUFACTURING METHOD SAID SUBSTRATE, AND BIOMOLECULE EXTRACTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/182313
Kind Code:
A1
Abstract:
The present invention pertains to a substrate with β-type gallium oxide nano rods that includes: a substrate having a pair of main surfaces; and a plurality of β-type gallium oxide nano rods which are formed on the substrate. The β-type gallium oxide nano rods are arrayed so as to be perpendicular to at least one of the main surfaces of the substrate.
Inventors:
HORI MASARU (JP)
ODA OSAMU (JP)
DHASIYAN ARUN KUMAR (JP)
HAYASHI ATSUSHI (JP)
AOMINE NOBUTAKA (JP)
ODA OSAMU (JP)
DHASIYAN ARUN KUMAR (JP)
HAYASHI ATSUSHI (JP)
AOMINE NOBUTAKA (JP)
Application Number:
PCT/JP2023/011021
Publication Date:
September 28, 2023
Filing Date:
March 20, 2023
Export Citation:
Assignee:
NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (JP)
AGC INC (JP)
AGC INC (JP)
International Classes:
H01L21/365; C12M1/00; C23C14/08; C23C16/40; C30B23/02; C30B29/16; C30B29/62; G01N33/53
Domestic Patent References:
| WO2021131331A1 | 2021-07-01 | |||
| WO2020071175A1 | 2020-04-09 |
Foreign References:
| JP2005239524A | 2005-09-08 | |||
| JP2019067915A | 2019-04-25 | |||
| JP2016064961A | 2016-04-28 | |||
| JP2016051796A | 2016-04-11 |
Attorney, Agent or Firm:
EIKOH, P.C. (JP)
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