SUPPORT METHOD AND SUPPORT STRUCTURE FOR OPTICAL MEMBER, OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

Title:

SUPPORT METHOD AND SUPPORT STRUCTURE FOR OPTICAL MEMBER, OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

Document Type and Number:

WIPO Patent Application WO/2006/009064

Kind Code:

A1

Abstract:

A spacer member (93) is placed between a lens (92), which is the lens at the lowermost end out of lenses, and a parallel flat plate (94) placed below the lens (92), and portions of the lens (92) and the parallel flat plate are sucked to cause the lens (92) to support the plate in a suspended manner. Accordingly, the spacer member (93) is not necessary to be larger than the parallel flat plate (94), and a sufficient space near the parallel flat plate (94) can be secured in comparison with the case where a holding mechanism is used to hold the parallel plate (94) by gripping. Further, since the parallel flat plate (94) is not gripped, deformation of the plate (94) can be avoided and aberration in a projection unit (PU) can be restricted.

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Inventors:

SHIBAZAKI YUICHI (JP)

Application Number:

PCT/JP2005/013030

Publication Date:

January 26, 2006

Filing Date:

July 14, 2005

Export Citation:

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Assignee:

NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)

International Classes:

H01L21/027; G02B7/00; G02B7/02; G03F7/20

Domestic Patent References:

WO1999049504A1

1999-09-30

Foreign References:

JPH0983877A	1997-03-28
JPH06177007A	1994-06-24
JP2004191920A	2004-07-08
JP2004193252A	2004-07-08
US2953970A	1960-09-27

Other References: