Title:
SURFACE ACOUSTIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/270406
Kind Code:
A1
Abstract:
[Problem] The present invention provides a surface acoustic device that can further reduce the acoustic velocity of a propagated surface acoustic wave, and for which reduced size and lower frequency are possible. [Solution] A piezoelectric substrate 11 is formed from a single crystal of LiNbO3 with Euler angles of (–5° to 35°, 95° to 110°, 0°±5°), or a single crystal of LiTaO3 with Euler angles of (–5° to 35°, 113° to 142°, 0°±5°). An interdigital electrode 12 is provided on one surface of the piezoelectric substrate 11, and the density is 8100 kg/m3 or greater. A ground substrate 13 is formed from a material or a crystal that is isotropic in relation to acoustic wave propagation, and is provided on the other surface of the piezoelectric substrate 11. In the ground substrate 13, the acoustic velocity of a propagated longitudinal wave is a speed lower than 8431 m/s, or the acoustic velocity of a propagated transverse wave is a speed lower than 5341 m/s, or the density is lower than the density of the piezoelectric substrate 11.
Inventors:
KADOTA MICHIO (JP)
TANAKA SHUJI (JP)
TANAKA SHUJI (JP)
Application Number:
PCT/JP2022/024130
Publication Date:
December 29, 2022
Filing Date:
June 16, 2022
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018097016A1 | 2018-05-31 |
Foreign References:
| JP2019036963A | 2019-03-07 | |||
| JP2020065158A | 2020-04-23 |
Attorney, Agent or Firm:
KUSUNOKI Shuji (JP)
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