Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/081026
Kind Code:
A1
Abstract:
Provided is a surface acoustic wave device capable of using a Love wave propagating in a LiNbO3 substrate, and capable of achieving low loss.
A surface acoustic wave device (1) for which IDT electrodes (3) are formed on a LiNbO3 substrate (2) and a dielectric layer comprising a silicon oxide film (4) is provided so as to cover the IDT electrodes (3), with the IDT electrodes (3) being composed mainly of Al, and grooves (2a) being formed between the electrode fingers (3a, 3a) of the IDT electrodes (3) at the upper surface of the LiNbO3 substrate (2), said surface acoustic wave device using a Love wave propagating in the LiNbO3 substrate (2).
Inventors:
YAMANE TAKASHI (JP)
Application Number:
PCT/JP2012/080817
Publication Date:
June 06, 2013
Filing Date:
November 29, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H01L41/09; H01L41/18; H01L41/22; H03H9/145
Foreign References:
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| JPH04199906A | 1992-07-21 | |||
| JP2001044787A | 2001-02-16 | |||
| JP2009212580A | 2009-09-17 | |||
| JP2007235711A | 2007-09-13 | |||
| JPS54156455A | 1979-12-10 | |||
| JP2001267870A | 2001-09-28 | |||
| JP2010177820A | 2010-08-12 | |||
| JP2010206246A | 2010-09-16 | |||
| JP2011130006A | 2011-06-30 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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Claims: