Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/269721
Kind Code:
A1
Abstract:
[Problem] To provide a surface acoustic wave device that can further reduce the sound velocity of a propagating surface acoustic wave, and that can be made more compact and have a lower frequency. [Solution] A piezoelectric substrate 11 is formed from a single crystal of LiNbO3 or LiTaO3. An interdigital electrode 12 is provided on one surface of the piezoelectric substrate 11 and has a density of 8,100 kg/m3 or more. A base substrate 13 is provided on the other surface of the piezoelectric substrate 11 and comprises a material or a crystal that is isotropic with respect to the propagation of elastic waves. The base substrate 13 is such that the sound velocity of a propagating longitudinal wave is lower than 8,431 m/s, the sound velocity of a propagating transverse wave is lower than 5,341 m/s, or the density is lower than that of the piezoelectric substrate 11.
Inventors:
KADOTA MICHIO (JP)
TANAKA SHUJI (JP)
TANAKA SHUJI (JP)
Application Number:
PCT/JP2021/023478
Publication Date:
December 29, 2022
Filing Date:
June 21, 2021
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2018097016A1 | 2018-05-31 | |||
| WO2015012005A1 | 2015-01-29 |
Foreign References:
| US20200119710A1 | 2020-04-16 |
Attorney, Agent or Firm:
KUSUNOKI Shuji (JP)
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