Title:
SURFACE ACOUSTIC WAVE DEVICES WITH ULTRA-THIN TRANSDUCERS
Document Type and Number:
WIPO Patent Application WO/2022/063231
Kind Code:
A1
Abstract:
A surface acoustic wave (SAW) device and methods of making the same are disclosed. The surface acoustic wave device includes a piezoelectric layer coupled to a high acoustic velocity layer at a first surface of the piezoelectric layer. At least one transducer is provided over a second surface of the piezoelectric layer. The at least one transducer comprises a plurality of IDT electrodes that are formed from a substantially two-dimensional (2D) conductive material and configured to propagate a surface acoustic wave having an operating wavelength along the piezoelectric layer.
Inventors:
CHEN ZHUOHUI (CN)
Application Number:
PCT/CN2021/120341
Publication Date:
March 31, 2022
Filing Date:
September 24, 2021
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H03H9/64
Foreign References:
| CN111316566A | 2020-06-19 | |||
| CN103954823A | 2014-07-30 | |||
| US20180219525A1 | 2018-08-02 |
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