Title:
SURFACE ACOUSTIC WAVE RESONATOR STRUCTURE, FORMING METHOD THEREFOR AND FILTER
Document Type and Number:
WIPO Patent Application WO/2024/074115
Kind Code:
A1
Abstract:
Provided in the embodiments of the present disclosure are a surface acoustic wave resonator structure, a forming method therefor and a filter. The surface acoustic wave resonator structure comprises: a piezoelectric substrate; an interdigital transducer which comprises a first interdigital electrode structure and a second interdigital electrode structure, the first interdigital electrode structure comprising first interdigital electrodes and a first interdigital electrode lead-out part which are connected to each other, the second interdigital electrode structure comprising second interdigital electrodes and a second interdigital electrode lead-out part which are connected to each other, and the first interdigital electrodes and the second interdigital electrodes extending in a first direction and being alternately arranged in a second direction; a temperature compensation layer, which is arranged on the side of the interdigital transducer away from the piezoelectric substrate; and a first protection layer arranged between the interdigital transducer and the temperature compensation layer, the protection layer being configured to protect the interdigital transducer against oxidization.
Inventors:
WENG GUOJUN (CN)
TANG GONGBIN (CN)
LIU JINGYONG (CN)
TANG GONGBIN (CN)
LIU JINGYONG (CN)
Application Number:
PCT/CN2023/122451
Publication Date:
April 11, 2024
Filing Date:
September 28, 2023
Export Citation:
Assignee:
SHENZHEN NEWSONIC TECH CO LTD (CN)
International Classes:
H03H9/25; H03H9/02; H03H9/145
Foreign References:
| CN115296642A | 2022-11-04 | |||
| CN112886938A | 2021-06-01 | |||
| CN113452342A | 2021-09-28 | |||
| US20180054179A1 | 2018-02-22 | |||
| CN113489471A | 2021-10-08 |
Attorney, Agent or Firm:
LIU , SHEN & ASSOCIATES (CN)
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