Title:
SURFACE SHAPE DETECTION DEVICE AND DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/208680
Kind Code:
A1
Abstract:
This surface shape detection device using a differential interference optical system realizes a reduction in decoding error for the surface shape while maintaining the same resolution. The surface shape detection device comprises: a light spot scanning unit such as a wafer rotational direction drive unit 219 that scans a surface of a wafer 215 using a light spot; an interference light detection mechanism such as a differential interference optical system 221 that detects interference light attained by scanning the surface of the object being tested using a plurality of light spots that are separated from each other by a prescribed design distance; and a surface shape decoding processing unit such as a wafer shape decoding unit 230 that computes interference light information by performing sampling at a prescribed quantization time interval, and performs decoding processing of the surface shape of the wafer. The prescribed design distance is configured to be greater than a quantization distance interval corresponding to the prescribed quantization time interval.
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| WO/2020/104813 | OPTICAL MICROSCOPY |
Inventors:
YAMADA KENICHIRO (JP)
ONOE SHINSUKE (JP)
HOSAKA MAKOTO (JP)
ONOE SHINSUKE (JP)
HOSAKA MAKOTO (JP)
Application Number:
PCT/JP2019/015314
Publication Date:
October 15, 2020
Filing Date:
April 08, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G02B21/14; G01B11/24; G01N21/956; G02B21/36
Foreign References:
| JP2009075034A | 2009-04-09 | |||
| JP2004077609A | 2004-03-11 | |||
| JP2002365236A | 2002-12-18 | |||
| JPH10260358A | 1998-09-29 | |||
| US20140118721A1 | 2014-05-01 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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