Title:
SURFACE SHAPE MEASURING DEVICE AND MACHINE TOOL PROVIDED WITH SAME, AND SURFACE SHAPE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/107751
Kind Code:
A1
Abstract:
Provided is a surface shape measuring device (140) wherein a displacement meter (100) comprises: a light emitting unit (110) that projects a light beam (116) toward a measurement subject (130); an optical system (118) that focuses the scattered light of the light beam from the measurement subject (130); and a light receiving unit (120) that detects the focus position of the optical system (118). A movement mechanism (146) scans the light beam (116) by causing the displacement meter (100) and the measurement subject (130) to move relatively. A measurement control unit (156) is configured as follows: in order that the light receiving unit (120) is positioned, with respect to the light emitting unit (110), ahead of or following the scanning direction of the light beam (116), the light beam (116) is scanned by the movement mechanism (146), and during scanning of the light beam (116), the surface displacement of the measurement subject (130) is continuously measured, as surface shape data, by the displacement meter (100).
Inventors:
ONO KATSUHIKO (JP)
NISHIKAWA SHIZUO (JP)
NISHIKAWA SHIZUO (JP)
Application Number:
PCT/JP2014/079053
Publication Date:
July 23, 2015
Filing Date:
October 31, 2014
Export Citation:
Assignee:
DMG MORI SEIKI CO LTD (JP)
International Classes:
G01B11/24; B23Q17/24
Foreign References:
| US20080137071A1 | 2008-06-12 | |||
| JP2011020233A | 2011-02-03 | |||
| JPH0658723A | 1994-03-04 | |||
| US20090195790A1 | 2009-08-06 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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