Title:
SURFACE TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/238608
Kind Code:
A1
Abstract:
This surface treatment method for planarizing a surface to be treated (W1) which is a surface of a workpiece (W) includes the procedure, processing, or steps described below. With an alkaline electrolyte solution (S) sandwiched between a grinding stone layer (32) and the surface to be treated. which are disposed opposing each other, electrical current is circulated with the workpiece serving as the anode so as to cause anodization which generates an oxide on the surface to be treated. The oxide generated on the surface to be treated as a result of the anodization is removed by the grinding stone layer.
Inventors:
AOKI KAZUFUMI (JP)
MARUNO NAOKI (JP)
SOLTANI BAHMAN (JP)
HORI KANTARO (JP)
FURUKAWA RYUTA (JP)
KATO YUYA (JP)
MARUNO NAOKI (JP)
SOLTANI BAHMAN (JP)
HORI KANTARO (JP)
FURUKAWA RYUTA (JP)
KATO YUYA (JP)
Application Number:
PCT/JP2023/018139
Publication Date:
December 14, 2023
Filing Date:
May 15, 2023
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
H01L21/304; B23H5/00; C25F3/16
Foreign References:
| JP2021027359A | 2021-02-22 | |||
| JP2004276219A | 2004-10-07 | |||
| JPH11185253A | 1999-07-09 | |||
| JP2020164918A | 2020-10-08 | |||
| JP2022015565A | 2022-01-21 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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