Title:
SYSTEM AND METHOD FOR MONITORING MOVING AND STEPPING SILICON WAFERS
Document Type and Number:
WIPO Patent Application WO/2024/002008
Kind Code:
A1
Abstract:
Embodiments of the present disclosure are directed to a system for monitoring moving and stepping silicon wafers and a method adopts the system. The system includes a first sensing element to monitor whether a gap between adjacent silicon wafers exists, and a second sensing element to monitor whether two silicon wafers are laminated. The first sensing element and the second sensing element are both disposed in a slot where the silicon wafers are turned over, and suspended on a front side of a sorting wheel in the slot and obliquely arranged towards one side of the sorting wheel. The system installed in the narrow space between the cleaning tank and the sorting tank has simple structure and is capable of quickly and accurately monitoring the silicon wafer turnover, and accurately determining whether there is a continuous or laminated silicon wafer during the silicon wafer turnover process.
Inventors:
JIN LIHUI (CN)
YANG HUA (CN)
REN ZHIGAO (CN)
GENG MINGQIANG (CN)
WANG HUAN (CN)
AL CHUANLING (CN)
WANG DAWEI (CN)
WU ZHIJUN (CN)
CEN HONGXIA (CN)
WEI CHEN (CN)
YANG HUA (CN)
REN ZHIGAO (CN)
GENG MINGQIANG (CN)
WANG HUAN (CN)
AL CHUANLING (CN)
WANG DAWEI (CN)
WU ZHIJUN (CN)
CEN HONGXIA (CN)
WEI CHEN (CN)
Application Number:
PCT/CN2023/102409
Publication Date:
January 04, 2024
Filing Date:
June 26, 2023
Export Citation:
Assignee:
TCL ZHONGHUAN RENEWABLE ENERGY TECH CO LTD (CN)
International Classes:
H01L21/67
Domestic Patent References:
| WO2016201717A1 | 2016-12-22 |
Foreign References:
| CN217847884U | 2022-11-18 | |||
| CN211507665U | 2020-09-15 | |||
| CN103964233A | 2014-08-06 | |||
| CN107799430A | 2018-03-13 | |||
| KR20030066036A | 2003-08-09 | |||
| US20060011284A1 | 2006-01-19 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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