Title:
SYSTEM AND METHOD FOR SENSING USING ADJUSTABLE MODULATION TRANSFER FUNCTION (MTF)
Document Type and Number:
WIPO Patent Application WO2005114697
Kind Code:
A3
Abstract:
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as abasing and maintaining contrast.
Inventors:
CHUANG YUNG-HO (US)
ARMSTRONG JOSEPH J (US)
BROWN DAVID LEE (US)
TSAI BIN-MING BENJAMIN (US)
ARMSTRONG JOSEPH J (US)
BROWN DAVID LEE (US)
TSAI BIN-MING BENJAMIN (US)
Application Number:
PCT/US2005/017844
Publication Date:
June 22, 2006
Filing Date:
May 19, 2005
Export Citation:
Assignee:
KLA TENCOR TECH CORP (US)
CHUANG YUNG-HO (US)
ARMSTRONG JOSEPH J (US)
BROWN DAVID LEE (US)
TSAI BIN-MING BENJAMIN (US)
CHUANG YUNG-HO (US)
ARMSTRONG JOSEPH J (US)
BROWN DAVID LEE (US)
TSAI BIN-MING BENJAMIN (US)
International Classes:
H01J5/02; H01J40/14; H01L27/146
Foreign References:
| US4898060A | 1990-02-06 |
Other References:
See also references of EP 1756849A4
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