Title:
SYSTEM FOR MONITORING FAILURE OF SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MONITORING FAILURE OF SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/145606
Kind Code:
A1
Abstract:
This system for monitoring failures of a substrate processing apparatus monitors failures of a substrate processing apparatus that performs predetermined processing to a substrate to be processed. The system is provided with: an alarm collecting means, which collects alarms that have been issued by the substrate processing apparatus; and an analyzing means, which analyzes the alarms collected by the alarm collecting means, and which displays, as an image on a two-dimensional space, the frequencies at which the alarms have been issued in each of the monitor periods, said two dimensional space having one axis indicating alarm IDs that specify areas where the alarms are issued, and the other axis indicating the predetermined monitor periods.
Inventors:
NAMIOKA ICHIRO (JP)
Application Number:
PCT/JP2013/001691
Publication Date:
October 03, 2013
Filing Date:
March 14, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/02; G01N35/00; H01L21/66
Domestic Patent References:
| WO2006059625A1 | 2006-06-08 |
Foreign References:
| JP2009216401A | 2009-09-24 | |||
| JP2008147443A | 2008-06-26 | |||
| JP2007305633A | 2007-11-22 | |||
| JP2006268445A | 2006-10-05 | |||
| JP2006215921A | 2006-08-17 | |||
| JP2005175283A | 2005-06-30 | |||
| JP2005142467A | 2005-06-02 | |||
| JP2004296765A | 2004-10-21 | |||
| JP2003124086A | 2003-04-25 | |||
| JPH11345752A | 1999-12-14 | |||
| JPH0950949A | 1997-02-18 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, p. c. (JP)
Patent business corporation cherry tree international patent firm (JP)
Patent business corporation cherry tree international patent firm (JP)
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