Title:
SYSTEM FOR PRODUCING ULTRAPURE WATER AND METHOD FOR PRODUCING ULTRAPURE WATER
Document Type and Number:
WIPO Patent Application WO/2018/096700
Kind Code:
A1
Abstract:
Provided is a system for producing ultrapure water, said system being provided with a pre-treatment system, a primary purification system, and a secondary purification system in the stated order, wherein: the primary/secondary pure water system is provided with an ion exchange device that treats boron-containing to-be-treated water using an ion-exchange resin; the ion exchange device has an accommodation part for filling in the ion-exchange resin, a supply part for supplying the to-be-treated water to the accommodation part, and a discharge part for discharging treated water from the accommodation part; and, in the accommodation part, a boron-selective ion-exchange resin fills the supply-part side, and an ion-exchange resin other than the boron-selective ion-exchange resin fills the discharge-part side. Such a system for producing ultrapure water and method for producing ultrapure water make it possible to stably obtain ultrapure water having a reduced concentration of boron without applying a TOC load to a subsystem.
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Inventors:
CHUUMAN TAKAAKI (JP)
MIYAZAKI YOICHI (JP)
MIYAZAKI YOICHI (JP)
Application Number:
PCT/JP2017/010270
Publication Date:
May 31, 2018
Filing Date:
March 14, 2017
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
C02F1/42; B01J43/00; B01J45/00; B01J47/026; B01J47/04
Foreign References:
JPH0884986A | 1996-04-02 | |||
JP2016047496A | 2016-04-07 | |||
JP2005246126A | 2005-09-15 | |||
JP2015136685A | 2015-07-30 | |||
JP2014100706A | 2014-06-05 |
Attorney, Agent or Firm:
HAYAKAWA Yuzi et al. (JP)
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