Title:
SYSTEMS AND METHODS OF MANUFACTURING INTEGRATED PHOTONIC CIRCUIT DEVICES
Document Type and Number:
WIPO Patent Application WO2003058307
Kind Code:
A3
Abstract:
T he systems and methods of the present invention includes the manufacturing of integrated photonic circuit devices using deposition processes such as, for example, supercritical fluid deposition (SFD). The present invention further includes the coupling of photonic crystal structures and planar waveguides to provide high performance, low-cost and scalable photonic components. Preferred embodiments of the methods in accordance with the present invention produce high quality metal, metal oxide, polymers, semiconductor and metal alloy deposits of precisely tailored composition in the form of thin films, conformal coatings on topologically complex surfaces, uniform deposits within high aspect ratio features, and both continuous and discrete deposits within microporous supports. Moreover, the absence of surface tension inherent to supercritical solutions ensures complete wetting of surfaces of varying complexities.
Inventors:
SALERNO JACK P (US)
JIN GUANGHAI (US)
BRADY DAVID J (US)
DOUGHTY CHRISTOPHER (US)
JIN GUANGHAI (US)
BRADY DAVID J (US)
DOUGHTY CHRISTOPHER (US)
Application Number:
PCT/US2002/041592
Publication Date:
May 21, 2004
Filing Date:
December 27, 2002
Export Citation:
Assignee:
XTALIGHT INC (US)
SALERNO JACK P (US)
JIN GUANGHAI (US)
BRADY DAVID J (US)
DOUGHTY CHRISTOPHER (US)
SALERNO JACK P (US)
JIN GUANGHAI (US)
BRADY DAVID J (US)
DOUGHTY CHRISTOPHER (US)
International Classes:
G02B6/12; G02B6/122; G02B6/34; G02F1/21; (IPC1-7): G02B6/13
Foreign References:
| US6134043A | 2000-10-17 | |||
| EP1039561A2 | 2000-09-27 | |||
| US5406573A | 1995-04-11 | |||
| EP0453107A1 | 1991-10-23 | |||
| EP1024524A2 | 2000-08-02 | |||
| US5997795A | 1999-12-07 |
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